Determination of the sheet resistance of an infinite thin plate with five point contacts located at arbitrary positions

نویسندگان

چکیده

In this paper, a five-probe method of sheet resistance measurement that is independent probe positions reported. The strict for an infinite homogeneous plane. It has potential applications as standard based on planar molecular layers. can be used to measure the layers covering objects with spherical topology, particularly micro- and nanometric scales, where it difficult control positioning.

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ژورنال

عنوان ژورنال: Measurement

سال: 2021

ISSN: ['1873-412X', '0263-2241']

DOI: https://doi.org/10.1016/j.measurement.2020.108360